Super Tall Single Wafer Reactor
Heater module for manufacturing a single wafer in the electronics and semiconductor industry!
Please consider not only conventional silicon device applications but also thermal processing applications for silicon-based power devices (IGBT) and annealing processes for compound semiconductors (GaN, SiC), as well as epitaxial growth equipment.
- Company:アレイマジャパン カンタルカンパニー
- Price:Other